A Study of the Formation of Cu-Ti-O Thin Film on the Al2O3 Surface by Sol-Gel...
The high volume fraction of ceramic composite materials（Al2O3/Cu） that is good thermal conductivity of copper and wear resistance of alumina ceramic,and its applications have obvious value and market...
View ArticleImprove Development Capability of IP Resist on Photomask with Plasma Surface...
Optical microlithography plays very important role in the microelectronics industry. Acted as the process base of wafer fab for the past several years while the use of CAR resist is rapidly increasing,...
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